Planarization Processes for Pre-FIB Sample Preparation
نویسندگان
چکیده
منابع مشابه
TEM Sample Preparation and FIB-Induced Damage
Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino, and Joseph Michael preparation can be applied to almost any material type—hard, soft, or combinations thereof. The number of materials for which successful TEM sample preparation with FIBs has been documented certainly reaches several hundred and spans from hard matter such as metals, ceramics, and composites to soft matter including polymers, ...
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Preparation of Transmission Electron Microscope (TEM) samples by Focused Ion Beam (FIB) milling is one of the most precise techniques now routinely used for example in failure analysis or material science. These TEM samples are commonly prepared using Ga FIB technology, starting more than 20 years ago [13]. Presently FIB columns are commonly combined with the Scanning Electron Microscopy (SEM) ...
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Focused ion beam (FIB) instrumentation has proven to be extremely useful for preparing cross-sectional samples for transmission electron microscopy (TEM) investigations. The two most widely used methods involve milling a trench on either side of an electron-transparent window: the “H-bar” and the “lift-out” methods [1]. Although these two methods are very powerful in their versatility and abili...
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The focused-ion-beam (FIB) is the method of choice for site-specific sample preparation for Transmission Electron Microscopy (TEM) in material sciences. A lamella can be physically lifted out from a specific region of a bulk specimen with submicrometer precision and thinned to electron transparency for high-resolution imaging in the TEM. The possibility to use this tool in life sciences applica...
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While FIB sample preparation for transmission electron microscopy is a well established technique, few examples exist of samples of sufficient quality for atomic resolution imaging by aberration corrected (scanning) transmission electron microscopy (STEM). In this work we demonstrate the successful preparation of such samples from five different materials and present the refined lift-out prepar...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2002
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927602105496